Biography:
Michael Pittroff currently holds the position as global marketing manager for electronic gases for the business unit electronics of Solvay`s global business unit Special Chem. He started to work on development of environmentally friendly processes in the Solvay group (Laboratoire Central) of Solvay, Brussels Belgium in 1993. Since then, he has developed several new processes or products for Solvay, mainly for gases. In 2006 he joint Solvay Korea to support the group in building up a high purity gases plant for semiconductors and establishing an agent network in Asia. Solvaclean® was developed together with Texas Instruments after his return to Germany in 2012.
Title : Environmental-Friendly Fluorine Mixture for CVD Cleaning Processes to replace C2F6 and NF3 under industrial Conditions