HYBRID EVENT: You can participate in person at Paris, France or Virtually from your home or work.
Cristian Ravariu, Speaker at Green Chemistry Conferences
Universitatea Politehnica Bucuresti, Romania
Title : Solutions from Green Chemistry to co-Integrate Biomaterials near Electronic Devices


After 2022, when the Moore’s law rigorously fulfilled for CMOS technology, the future electronic devices entered into the co-integration period. The Silicon CMOS parts keep the circuit complexity at a low enough price, while the integrated layers can be enzyme membranes to offer sensitive transistors to low analyte concentrations, Organic Thin Film Transistors to put in agreement the Si-circuitry with commended OLEDs for displays, or biomaterials and nano-structured oxides to co-integrate biosensors at low prices and multiple usage for Lab-On-Chip applications. Proposals are multiple, alternative bio-devices are known as work-function, while nanoscale technologies open new facilities to co-immobilize enzymes and antibodies in the CMOS proximity. This work presents solution of co-integration between an enzyme receptor and Silicon MOS device. The final biosensor that works with field effect transistors (FET) as transducers and enzyme as bio-receptor is called EN-FET device. In the actual work, a traditional MOS-FET transistor is co-integrated with the glucose-oxidase enzyme, offering a glucose biosensor. The paper is focused on the manufacturing process optimization of an ENFET. Above the MOS gate oxide, the glucose-oxidase (GOX) receptor is entrapped onto a nano-structured-TiO2 compound, as a green technological solution, instead of Polycyclic aromatic hydrocarbons PAH functionalization techniques. The paper proposes multiple details for co-integration between MOS devices with enzymatic biosensors. The Ti conversion into nanostructured layer occurs by anodization. Separate situations of GOX entrapment on nanostructured TiO2 in contact to a Si-wafer are presented. Two cross-linkers are experimental studied for a better enzyme immobilization. The final part of the report combines experimental data with analytical models to extract the calibration curve of the ENFET transistor, prescribing in the same time a design methodology.

Audience take away:

  • How TiO2 layers can be attached to Si-wafers.
  • How glucose-oxidase enzyme is attached onto nanostructured TiO2 layer.
  • Technological process characterizations are presented.


Prof. C. Ravariu studied Microelectronics at the Polytechnic University of Bucharest, Romania and graduated as MS in 1993. He worked as scientific researcher first 5 years at Institute of Microtechnology, Bucharest, then joined the Polytechnic University of Bucharest. After multiple foreign stages in Bioelectronics (Patras, Greece), Nano-devices (EPFL, Switzerland), Organic Electronics (LAAS, France), he received PostDoc degree in 2012 in Romania. Since 2013 he obtained the position of  Full Professor at the Polytechnic University of Bucharest, Faculty of Electronics, Romania. He has published more than 250 research articles. Since 2014 he is Chairman of the Romanian IEEE Electron Devices Chapter and his main interest is in nano-bio-devices for electronics and biomedical research.